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IEC 62047-32 Ed. 1.0 b:2019

IEC 62047-32 Ed. 1.0 b:2019 Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

standard by International Electrotechnical Commission, 01/24/2019

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IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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Edition: 1.0 Published: 01/24/2019 Number of Pages: 37 File Size: 1 file , 1.5 MB